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New NIST Reference Materials for MEMS devices are micromachined and further processed to contain miniature cantilevers, beams, stair-like step heights, microscale rulers and test structures for measuring surface-layer thickness. On the left is RM 8096, which was manufactured with an integrated circuit process; on the left is RM 8097, made with a MEMS process. Credit: NIST |
As markets for miniature, hybrid machines known as MEMS grow and diversify, the National Institute of Standards and Technology (NIST) has introduced a long-awaited measurement tool that will help growing numbers of device designers, manufacturers and customers to see eye to eye on eight dimensional and material property measurements that are key to device performance.
The NIST-developed test chips (Reference Materials 8096 and 8097) are quality assurance tools that enable accurate, reliable comparisons of measurements on MEMS (MicroElectroMechanical Systems) devices made with different equipment and by different labs or companies. These capabilities will make it easier to characterize and troubleshoot processes, calibrate instruments and communicate among partners.
MEMS were once considered a stepchild of the semiconductor industry and largely confined to automotive uses—primarily as accelerometers in airbag systems. But the devices have branched out into an array of applications, especially in consumer electronics markets. A high-end smart phone, for example, contains about 10 such devices, including microphones, accelerometers and gyroscopes. MEMS devices also are important components of tablet computers, game consoles, lab-on-a-chip diagnostic systems, displays and implantable medical devices.
NIST: New NIST Measurement Tool Is On Target for the Fast-Growing MEMS Industry
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